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负压隔膜泵通过隔膜往复运动实现流体输送，具备深度真空抽取与高压流体压缩的功能，在精密流量及真空控制等领域得到广泛应用。负压隔膜泵所能达到的负压值及负压稳定性是影响流量、噪声和负载振动的关键，本文基于减小隔膜形变占用体积以提高隔膜泵负压性能的原理，提出了增大隔膜刚性支撑横梁尺寸、降低偏心轮偏心量的高负压隔膜结构设计优化方法；并对其改进优化效果进行了实验验证。实验结果表明，改进优化后的负压隔膜泵相比改进前，稳态负压值提升4.8%，输出流量增加7.0%，运行噪声声压级降低11.1%，关键测点振动加速度降低34.9%；加速老化后的各项性能指标衰减程度也有显著降低。所提出的结构优化设计方法能有效实现负压隔膜泵在高负压、低扰动方向上的性能定向提升，同时也增强了产品的耐久性与可靠性。
Abstract：Negative pressure diaphragm pumps achieve fluid transportation through the reciprocating motion of the diaphragm， and are widely used in fields such as precise flow and vacuum control due to their capabilities of deep vacuum extraction and high-pressure fluid compression. The achievable negative pressure level and its stability are critical factors affecting pump performance metrics such as flow rate， noise emission， and load vibration. A structural optimization method for high-negative-pressure diaphragms is proposed based on the principle that reducing the volume displaced by diaphragm deformation can enhance negative pressure performance. The approach involves enlarging the rigid support beam of the diaphragm and reducing the eccentricity of the drive wheel， and its optimization effect is experimentally verified. The experimental results show that compared to the original design， the optimized diaphragm pump exhibits a 4.8% increase in steady-state negative pressure， a 7.0% rise in output flow rate， an 11.1% reduction in operating noise (sound pressure level)， and a 34.9% decrease in vibration acceleration at key measurement points. Furthermore， the attenuation of performance indicators after accelerated aging tests was significantly mitigated. The presented structural optimization method effectively directs performance enhancement of diaphragm pumps toward higher negative pressure and lower disturbance， while simultaneously improving product durability and reliability.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202602003
中图分类号:TH323
引用信息:
[1]雷月霞,吴兵,曹俊峰,等.负压隔膜泵结构优化及性能验证[J].真空科学与技术学报().DOI:10.13922/j.cnki.cjvst.202602003.
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2026-06-03