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采用等离子体增强化学气相沉积技术，在2024铝合金表面沉积类金刚石（DLC）薄膜，研究了脉冲电压对薄膜微观键合结构、表面形貌以及整体服役性能的影响。结果表明，随脉冲电压升高，薄膜厚度不断增大，氢含量及C–H键逐渐减少，sp杂化键含量升高，表面粗糙度呈先降低后升高的趋势，在1800V时薄膜最为平整且致密。薄膜与基体的结合强度随电压增加而降低，高电压下内应力显著增大。薄膜硬度和弹性模量随电压先升高后降低，在1800V时分别达到16.75GPa和139.4GPa，同时摩擦系数最低、H/(Ef)值最高，表现出优异的耐磨性能。在3.5 wt%的NaCl介质中，DLC 薄膜作为有效的物理屏障，显著抑制了基体的电化学腐蚀过程。其中1800 V 电压下制备的薄膜展现出最大的阻抗与极低的孔隙率，具备最优异的综合耐蚀性能。脉冲电压作为关键工艺参数，调节了等离子体密度与轰击能量，从而主导了薄膜力学特性与化学稳定性的演化规律，进而影响DLC薄膜的力学性能及腐蚀行为。相应机理为铝合金表面高性能DLC防护涂层制备奠定了坚实的理论基础。
Abstract：Using plasma-enhanced chemical vapor deposition， diamond-like carbon (DLC) films were deposited on 2024 aluminum alloy substrates. The effects of pulse voltage on the film microstructure， surface morphology evolution， and overall service performance were systematically investigated. The results show that as the pulse voltage increased， the film thickness gradually increased， while the hydrogen content and C–H bond concentration decreased. Meanwhile， the fraction of sp2-hybridized carbon increased， and the surface roughness initially decreased and then increased. At 1800 V， the film exhibited the highest surface flatness and density. As the pulse voltage increased， the film–substrate adhesion decreased， whereas the internal (residual) stress rose markedly at higher voltages. The film hardness and elastic modulus exhibited a non-monotonic dependence on pulse voltage， increasing initially and then declining; both peaked at 1800 V， reaching 16.75 GPa and 139.4 GPa， respectively. At this voltage， the friction coefficient was minimized and the H/Ef ratio was maximized， indicating superior wear resistance.In a 3.5 wt% NaCl solution， the DLC films acted as effective physical barriers， significantly suppressing the electrochemical corrosion of the substrate. The film prepared at 1800 V exhibited the highest charge transfer resistance and extremely low porosity， demonstrating the best overall corrosion resistance. As a critical process parameter， pulse voltage regulates plasma density and ion bombardment energy， thereby controlling the evolution of mechanical properties and chemical stability. This， in turn， determines the mechanical performance and corrosion resistance of the DLC films. These findings provide a solid theoretical basis for the fabrication of high-performance DLC protective coatings on aluminum alloy substrates.
[1] Chen D X， Zhang T， Wang Y N， et al. Wear resistance and microstructure of the nitriding layer formed on 2024 aluminum alloy by plasma-enhanced nitriding at different nitriding times[J]. Materials Research Express， 2019， 6(6): 066405
[2] Li X， Wu H D， Jin J Y， et al. Erosion corrosion behavior of Si-DLC film deposited on 2024 aluminum alloy[J]. Chinese Journal of Vacuum Science and Technology， 2023， 43(02): 134-141 (李旭， 吴浩东， 金佳莹， 等. 2024铝合金表面沉积Si-DLC薄膜的冲刷腐蚀行为研究[J]. 真空科学与技术学报， 2023， 43(02): 134-141 (in Chinese))
[3] Shao H Q. Tribological behavior of ZL205A Al-Alloy modified with laser cladded Al2O3-doped NiCrAl coatings [J]. Chinese Journal of Vacuum Science and Technology， 2020， 40(11): 1034-1038 (邵海泉. 车用ZL205A铝合金激光熔覆Al2O3/NiCrAl涂层组织及摩擦性能研究[J]. 真空科学与技术学报， 2020， 40(11): 1034-1038 (in Chinese))
[4] Ding W W， Liu X X， Zhao X Y， et al. A new modifier for microstructure and mechanical properties of 6063 aluminum alloy[J]. Materials Research Express， 2020， 7(10): 106522
[5] Shan G， Mingyang W， Junhua H， et al. Influence of heat treatment on the mechanical and corrosion performance of 7050 aluminum alloy used in marine engineering[J]. Anti-Corrosion Methods and Materials， 2025， 72(4): 548-559
[6] Yu X M， Chen D X， Huo J Y， et al. Influence of diamond-like carbon film on the durability of hydrophobic structure of aluminum alloy[J]. Chinese Journal of Vacuum Science and Technology， 2022， 42(06): 475-481 (于欣淼， 陈东旭， 霍婧雅， 等. 类金刚石膜对铝合金疏水结构耐久性能影响[J]. 真空科学与技术学报， 2022， 42(06): 475-481 (in Chinese)).)
[7] Shi B， Wang L， Qin L， et al. Corrosion behavior of aluminum alloys in harsh marine atmospheric environment[J]. Anti-Corrosion Methods and Materials， 2025， 75(5): 761-775
[8] Chen J， Mraied H， Cai W. Determining tribocorrosion rate and wear-corrosion synergy of bulk and thin film aluminum alloys[J]. Journal of Visualized Experiments， 2018， (139): 1-11
[9] Pang C Z， Xing S H， Du M， et al. Research progress on wear corrosion Al-alloys in marine environment[J/OL]. Journal of Chinese Society for Corrosion and Protection， 2026， 1-17 (庞成泽， 邢少华， 杜敏， 等. 海洋环境下铝合金腐蚀磨损研究进展[J/OL]. 中国腐蚀与防护学报， 2026， 1-17 (in Chinese))
[10] Du C H， Bai X Q. Research Progress on Corrosion and Wear of Typical Metal Materials under Marine Environment[J]. Lubrication Engineering， 2021， 46(02): 121-133 (杜琮昊， 白秀琴. 海洋环境下典型金属材料腐蚀与磨损研究进展[J]. 润滑与密封， 2021， 46(02): 121-133 (in Chinese))
[11] Li J W. Effect of Interlayer on the Wear Resistance of DLC Film on Aluminum Alloy[J]. Materials Protection， 2020， 53(06): 105-109 (李积武. 铝合金表面DLC薄膜中间层对磨损性能的影响[J]. 材料保护， 2020， 53(06):105-109 (in Chinese))
[12] Luo H B， Yang D L， Lian X， et al. The effect of melting temperature on hybridization state of DLC film based on the molecular dynamic simulation[J]. Chinese Journal of Vacuum Science and Technology， 2024， 44(03): 266-271 (罗宏博， 杨来东， 连潇， 等. 熔融温度对DLC薄膜杂化状态影响的分子动力学研究[J]. 真空科学与技术学报， 2024， 44(03): 266-271 (in Chinese))
[13] Zhao Y， Jiang Z， Chen R， et al. Investigation of the corrosion stability of TiCN and diamond-like carbon (DLC) coatings on 304 stainless steel in simulated seawater: Electrochemical and numerical studies[J]. International Journal of Electrochemical Science， 2026， 21(3): 101295-101295
[14] Ding H Y， Zhou C P， Zhang Y， et al. Corrosion resistance of Ti/TiB2 multilayers in Hank's solution[J]. Chinese Journal of Vacuum Science and Technology， 2014， 34(06): 611-615 (丁红燕， 周长培， 章跃， 等. Ti/TiB2多层膜在Hank’s模拟体液中耐蚀性研究[J]. 真空科学与技术学报， 2014， 34(06): 611-615 (in Chinese))
[15] Wu S， Peng X， Liu Y， et al. The tribocorrosion behavior of multilayer DLC coatings with soft/hard structure during long-term service in 3.5 wt.% NaCl solution[J]. Diamond & Related Materials， 2026， 161， 1113143-113143
[16] Deng H Y. Study on Properties of Modified Diamond-like Carbon Films Prepared on Surface of 2024 Aluminum Alloys[D]. University of Science and Technology Liaoning， 2021 (邓洪运. 2024铝合金表面制备改性类金刚石薄膜性能研究[D]. 辽宁科技大学， 2021 (in Chinese))
[17] Hopf C， Schwarz-Selinger T， Jacob W， et al. Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces[J]. Journal of Applied Physics， 2000， 87(6): 2719-2725
[18] Heng Y C， Ding X Y， Cui M H， et al. Review status of adhesion strength regulation of diamond-like carbon films [J/OL]. China Surface Engineering， 1-17 (程影春， 丁啸云， 崔梦辉， 等. 类金刚石薄膜膜基结合强度调控研究现状[J/OL]. 中国表面工程， 1-17 (in Chinese))
[19] Neuville S. Quantum electronic mechanisms of atomic rearrangements during growth of hard carbon films[J]. Surface and Coatings Technology， 2011， 206(4): 703-726
[20] Zhao M H， Ren Y， Chen D X， et al. Localized corrosion of nitrogen-doped diamond-like carbon films on the surface of 304 stainless steel[J]. Surface & Coatings Technology， 2024， 484: 130810
基本信息:
DOI：10.13922/j.cnki.cjvst.202602015
中图分类号:TG174.4;TB383.2
引用信息:
[1]刘晗程,孙舒雅,陈东旭,等.脉冲电压大小对2024铝合金表面沉积DLC薄膜性能调控机制研究[J].真空科学与技术学报().DOI:10.13922/j.cnki.cjvst.202602015.
基金信息:
国家自然科学基金项目（52371066）; 辽宁科技大学大学生创新创业训练计划项目（202510146034）
2026-05-14
2026-05-14
2026-05-14