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针对超高真空获得中以氢气为代表的轻气体难以有效抽除，以及涡轮涡轮分子泵在跨流态(由分子流向过渡流转变)区域抽气效率显著衰减及结构设计缺乏理论指导的问题，本文采用基于 OpenFOAM 的直接模拟蒙特卡洛(DSMC)方法，建立了涡轮级二维叶列的数值计算模型。在验证了模型网格无关性并与Kruger理论值及Sawada实验数据进行对比验证的基础上，系统研究了不同流态下入口压力、转速比及结构参数(节弦比、叶列倾角)对抽气性能的敏感性规律，并利用等值线图揭示了工作压力与主要几何参数间的耦合影响规律。结果表明：随着流态从分子流进入过渡流，分子间碰撞频率增加导致抽气性能呈对数级下降，且高压下转速提升带来的性能增益逐渐饱和；Hmax在节弦比约为 1.2 时达到峰值，而Kmax随节弦比增大单调递减；最优叶列倾角存在随压力升高向小角度漂移的现象。此外，针对氢气压缩比极低的特性，本文从微观分子运输与碰撞机理层面解释了分段节弦比和变角度叶型等变参数涡轮叶列的物理合理性，为高性能涡轮分子泵的结构提供了理论依据。
Abstract：To address the challenges of removing light gases (H2) in ultra-high vacuum systems， the significant decay in pumping efficiency of turbomolecular pumps (TMPs) across different flow regimes， and the lack of theoretical guidance for structural design， a two-dimensional numerical model for a TMP blade row was established using the Direct Simulation Monte Carlo (DSMC) method in OpenFOAM. Based on the validation of grid independence and comparison with Kruger’s theoretical values and Sawada’s experimental data， the effects of inlet pressure， speed ratio， and structural parameters， including the pitch-to-chord ratio and blade-row inclination angle， on pumping performance under different flow regimes were systematically investigated， and contour maps were used to reveal the coupling effects between operating pressure and major geometric parameters. The results indicate that as the flow regime shifts from free molecular flow to transition flow， the increase in intermolecular collision frequency causes the pumping performance to decay logarithmically; moreover， the performance gain brought by increased rotational speed gradually saturates at higher pressures. It is found that Hmax peaks when the pitch-to-chord ratio is approximately 1.2， while Kmax decreases monotonically with the increase of the pitch-to-chord ratio. Furthermore， the optimal blade angle for maximizing pumping speed shifts towards smaller angles as the pressure increases. In addition， considering the extremely low compression ratio of hydrogen， this study explains the physical rationale for variable-parameter turbine blade-row designs， such as segmented pitch-to-chord ratios and variable blade-angle profiles， from the perspective of microscopic molecular transport and collision mechanisms， thereby providing a theoretical basis for the structural optimization of high-performance TMPs.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202603006
中图分类号:TB752
引用信息:
[1]蒲小琴,匡永麟,杜志华,等.涡轮分子泵跨流态模拟及结构灵敏度分析[J].真空科学与技术学报().DOI:10.13922/j.cnki.cjvst.202603006.
基金信息:
核质谱仪专用磁悬浮分子泵项目（JPPT-2023-167）
2026-05-15
2026-05-15
2026-05-15