2025 01 v.45 21-28
高谐振频率梳齿轴对称结构的MEMS扫描镜
基金项目(Foundation):
安徽省科技创新攻坚计划项目（202423k09020047）;
国家重点研发计划项目（2022YFB3205903）;
安徽省科技计划项目（PA2022AKGY0012）
邮箱(Email):
gbxu@hfut.edu.cn;
DOI:
10.13922/j.cnki.cjvst.202401006
中文作者单位:
合肥工业大学微电子学院安徽省MEMS工程技术研究中心;
摘要(Abstract):
针对静电驱动MEMS扫描镜存在谐振频率低、驱动电压较高等缺点，提出了一种具有高谐振频率、低驱动电压的二维MEMS扫描镜。该扫描镜采用轴对称分布的交错型垂直梳齿结构，通过对该器件进行了理论分析，建立了理论模型；利用COMSOL仿真软件对扫描镜做静态和动态的分析验证，结果表明梳齿轴对称结构在偏转时能提供更大的驱动力矩，同时避免传统梳齿的不平衡运动带来的干扰；扫描镜在12 V和16 V的正弦波电压驱动下，快轴和慢轴的谐振频率分别为11657 Hz、6211.4 Hz，相对应的机械偏转角为5.9°、6.6°；此外，扫描镜的两轴谐振频率相差较大，能够有效抑制两种运动状态的相互干扰。最后设计一套适用于该器件的制备工艺。
关键词(KeyWords):
微机电系统;轴对称梳齿;二维扫描镜;静电驱动
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参考文献
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[24]Qiao D,Zhao R,Zhang Y,et al.An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test[J].Microelectronics Reliability,2018,80:284-293
[25]Aunion Tech Co.,Ltd.A5M24.2-2400AL[DB/OL].2023.12.https:/www.auniontech.com/details-793.html
[2]Chen S,Zhang Y,Hong X,et al.Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review[J].Journal of Semiconductors,2022,43(8):081301
[3]Du L Y,XU G B,HUA X,et al.MEMS scanning mirror driven by double comb teeth for lidar[J].Journal of Electronic Measurement and Instrument,2021,35(5):8-15（杜林云,许高斌,花翔,等.用于激光雷达的双层梳齿驱动MEMS扫描镜[J].电子测量与仪器学报，2021,35(5):8-15(in Chinese））
[4]Chen C D,Lee Y H,Yeh C S.Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection[J].Smart Materials and Structures,2014,23(12):125007
[5]Wang D,Watkins C,Xie H.MEMS Mirrors for LiDAR:A review[J].Micromachines(Basel),2020,11(5):456
[6]Liu Y,Xu J,Zhong S,et al.Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror[J].Optik,2013,124(20):4100-4103
[7]Pengwang E,Rabenorosoa K,Rakotondrabe M,et al.Scanning micromirror platform based on MEMS technology for medical application[J].Micromachines (Basel),2016,7(2):24
[8]Qiao D Y,Yuan W Z,Ren Y.Review of MEMS lidar[J/OL].Microelectronics&Computer,2023(01):41-49（乔大勇,苑伟政,任勇.MEMS激光雷达综述[J/OL].微电子学与计算机,2023(01):41-49(in Chinese））
[9]Chen L,Gu W.Improvement and optimization of electromagnetic integrated scanning micromirror[J].Micromachines(Basel),2021,12(10):1213
[10]He J H,Zhou P,Yu H J,et al.Research on large size MEMS scanning mirror driven by electromagnetic[J].Acta Photonica Sinica,2017,46(1):21-28（何嘉辉,周鹏,余晖俊,等.电磁驱动大尺寸MEMS扫描镜的研究[J].光子学报，2017,46(1):21-28(in Chinese））
[11]Lei H,Wen Q,Yu F,et al.AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors[J].Journal of Micromechanics and Microengineering,2018,28(11):115012
[12]Dinesh Ram G,Praveen Kumar S,Srinivasan T K,et al.Analysis of piezoelectric based MEMS micromirror for optical communication[C].2022 3rd International Conference on Smart Electronics and Communication(ICOSEC).2022:1-4
[13]Tang Y,Li J,Xu L,et al.Review of electrothermal micromirrors[J].Micromachines,2022,13(3):429
[14]Bao H Q,Wei X,Li R.Research on V-beam MEMS electro-thermal actuator technology[J].Electronic Measurement Technology,2021,44(3):45-49（保慧琴,卫霞,李茹.V型MEMS电热执行器技术研究[J].电子测量技术，2021,44(3):45-49(in Chinese））
[15]Frangi A,Guerrieri A,Boni N,et al.Mode coupling and parametric resonance in electrostatically actuated micromirrors[J].IEEE Transactions on Industrial Electronics,2018,65(7):5962-5969
[16]Sadhukhan D,Singh G P.Study of electrostatic actuated MEMS biaxial scanning micro-mirror with comb structure[C].International Conference on Multifunctional Materials(Icmm-2019).2020,2269(1)
[17]Liu Y B,Yuan W Z,Qiao D Y,et al.Design and modes of a novel two-dimensional microscanner with electrostatic actuation[J].Acta Optica Sinica,2013,33(6):299-304（刘耀波,苑伟政,乔大勇,等.一种新型静电驱动二维微型扫描镜的设计及模态[J].光学学报，2013,33(6):299-304 (in Chinese））
[18]Moon S,Lee J,Yun J,et al.Two-Axis electrostatic gimbaled mirror scanner with self-aligned tilted stationary combs[J].IEEE Photonics Technology Letters,2016,28(5):557-560
[19]Shan Y M,Ren L J,Shen W J.Study on 2D electrostaticdriven micro scanning mirror applied to LiDAR[J].Sensor and Microsystem,2021,40(2):65-68+72（单亚蒙,任丽江,沈文江.应用于激光雷达的二维静电微镜设计[J].传感器与微系统，2021,40(2):65-68+72 (in Chinese））
[20]Farrugia R,Portelli B,Grech I,et al.Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPs process[C].2020 Symposium on Design,Test,Integration&Packaging of MEMS and MOEMS (DTIP),Lyon,France,2020:1-6
[21]Zhang X L,Xu Y Q,Du M X.Self-aligned technique for the driving structure of optical MEMS chips[J].Micro and Nano Electronics Technology,2018,55(5):366-370（张晓磊,徐永青,杜妙璇.光MEMS芯片驱动结构自对准技术[J].微纳电子技术，2018,55(5):366-370 (in Chinese））
[22]Urey H,Kan C,Davis W O.Vibration mode frequency formulae for micromechanical scanners[J].Journal of Micromechanics and Microengineering,2005,15(9):1713-1721
[23]Fu L J,Peng L,Wu L.Application of harmonic response analysis in equipment vibration reduction[J].China Special Equipment Safety,2022,38(6):20-25（付罗均,彭岚,吴龙.谐响应分析在设备减振中的应用[J].中国特种设备安全，2022,38(6):20-25 (in Chinese））
[24]Qiao D,Zhao R,Zhang Y,et al.An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test[J].Microelectronics Reliability,2018,80:284-293
[25]Aunion Tech Co.,Ltd.A5M24.2-2400AL[DB/OL].2023.12.https:/www.auniontech.com/details-793.html
基本信息:
DOI：10.13922/j.cnki.cjvst.202401006
中图分类号:TH74;TH-39
引用信息:
[1]王峰,许高斌,尹盛华等.高谐振频率梳齿轴对称结构的MEMS扫描镜[J].真空科学与技术学报,2025,45(01):21-28.DOI:10.13922/j.cnki.cjvst.202401006.
基金信息:
安徽省科技创新攻坚计划项目（202423k09020047）; 国家重点研发计划项目（2022YFB3205903）; 安徽省科技计划项目（PA2022AKGY0012）