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针对静电驱动MEMS扫描镜存在谐振频率低、驱动电压较高等缺点,提出了一种具有高谐振频率、低驱动电压的二维MEMS扫描镜。该扫描镜采用轴对称分布的交错型垂直梳齿结构,通过对该器件进行了理论分析,建立了理论模型;利用COMSOL仿真软件对扫描镜做静态和动态的分析验证,结果表明梳齿轴对称结构在偏转时能提供更大的驱动力矩,同时避免传统梳齿的不平衡运动带来的干扰;扫描镜在12 V和16 V的正弦波电压驱动下,快轴和慢轴的谐振频率分别为11657 Hz、6211.4 Hz,相对应的机械偏转角为5.9°、6.6°;此外,扫描镜的两轴谐振频率相差较大,能够有效抑制两种运动状态的相互干扰。最后设计一套适用于该器件的制备工艺。
Abstract:Aiming to address the drawbacks of electrostatic-driven MEMS scanning mirrors, such as low resonant frequency and high driving voltage, a novel two-dimensional MEMS scanning mirror with improved resonant frequency and reduced driving voltage is proposed. The scanning mirror adopts an interleaved vertical comb structure with axisymmetric distribution. Through the theoretical analysis of the device, the theoretical model is established. COMSOL simulation software is employed for static and dynamic analysis to verify the performance of the scanning mirror. The results demonstrate that the comb axisymmetric structure can provide greater driving torque during deflection, while avoiding the interference caused by the unbalanced motion of the traditional comb.Under the sine wave voltage of 12 V and 16 V, the resonant frequencies of the fast axis and the slow axis are11657 Hz and 6211.4 Hz, respectively, and the corresponding mechanical deflection angles are 5.9° and 6.6°.Furthermore, a significant disparity between the resonant frequencies of both axes effectively suppresses mutual interference between their respective motion states. Finally, a set of fabrication processes suitable for this device has been designed.
[1]Wang Q.Study on MEMS scanner based on electrostatic comb drive actuator[D].University of Chinese Academy of Sciences(Institute of Optoelectronic Technology,Chinese Academy of Sciences),2021(王强.静电梳齿驱动MEMS扫描镜研究[D].中国科学院大学(中国科学院光电技术研究所),2021(in Chinese))
[2]Chen S,Zhang Y,Hong X,et al.Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review[J].Journal of Semiconductors,2022,43(8):081301
[3]Du L Y,XU G B,HUA X,et al.MEMS scanning mirror driven by double comb teeth for lidar[J].Journal of Electronic Measurement and Instrument,2021,35(5):8-15(杜林云,许高斌,花翔,等.用于激光雷达的双层梳齿驱动MEMS扫描镜[J].电子测量与仪器学报,2021,35(5):8-15(in Chinese))
[4]Chen C D,Lee Y H,Yeh C S.Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection[J].Smart Materials and Structures,2014,23(12):125007
[5]Wang D,Watkins C,Xie H.MEMS Mirrors for LiDAR:A review[J].Micromachines(Basel),2020,11(5):456
[6]Liu Y,Xu J,Zhong S,et al.Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror[J].Optik,2013,124(20):4100-4103
[7]Pengwang E,Rabenorosoa K,Rakotondrabe M,et al.Scanning micromirror platform based on MEMS technology for medical application[J].Micromachines (Basel),2016,7(2):24
[8]Qiao D Y,Yuan W Z,Ren Y.Review of MEMS lidar[J/OL].Microelectronics&Computer,2023(01):41-49(乔大勇,苑伟政,任勇.MEMS激光雷达综述[J/OL].微电子学与计算机,2023(01):41-49(in Chinese))
[9]Chen L,Gu W.Improvement and optimization of electromagnetic integrated scanning micromirror[J].Micromachines(Basel),2021,12(10):1213
[10]He J H,Zhou P,Yu H J,et al.Research on large size MEMS scanning mirror driven by electromagnetic[J].Acta Photonica Sinica,2017,46(1):21-28(何嘉辉,周鹏,余晖俊,等.电磁驱动大尺寸MEMS扫描镜的研究[J].光子学报,2017,46(1):21-28(in Chinese))
[11]Lei H,Wen Q,Yu F,et al.AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors[J].Journal of Micromechanics and Microengineering,2018,28(11):115012
[12]Dinesh Ram G,Praveen Kumar S,Srinivasan T K,et al.Analysis of piezoelectric based MEMS micromirror for optical communication[C].2022 3rd International Conference on Smart Electronics and Communication(ICOSEC).2022:1-4
[13]Tang Y,Li J,Xu L,et al.Review of electrothermal micromirrors[J].Micromachines,2022,13(3):429
[14]Bao H Q,Wei X,Li R.Research on V-beam MEMS electro-thermal actuator technology[J].Electronic Measurement Technology,2021,44(3):45-49(保慧琴,卫霞,李茹.V型MEMS电热执行器技术研究[J].电子测量技术,2021,44(3):45-49(in Chinese))
[15]Frangi A,Guerrieri A,Boni N,et al.Mode coupling and parametric resonance in electrostatically actuated micromirrors[J].IEEE Transactions on Industrial Electronics,2018,65(7):5962-5969
[16]Sadhukhan D,Singh G P.Study of electrostatic actuated MEMS biaxial scanning micro-mirror with comb structure[C].International Conference on Multifunctional Materials(Icmm-2019).2020,2269(1)
[17]Liu Y B,Yuan W Z,Qiao D Y,et al.Design and modes of a novel two-dimensional microscanner with electrostatic actuation[J].Acta Optica Sinica,2013,33(6):299-304(刘耀波,苑伟政,乔大勇,等.一种新型静电驱动二维微型扫描镜的设计及模态[J].光学学报,2013,33(6):299-304 (in Chinese))
[18]Moon S,Lee J,Yun J,et al.Two-Axis electrostatic gimbaled mirror scanner with self-aligned tilted stationary combs[J].IEEE Photonics Technology Letters,2016,28(5):557-560
[19]Shan Y M,Ren L J,Shen W J.Study on 2D electrostaticdriven micro scanning mirror applied to LiDAR[J].Sensor and Microsystem,2021,40(2):65-68+72(单亚蒙,任丽江,沈文江.应用于激光雷达的二维静电微镜设计[J].传感器与微系统,2021,40(2):65-68+72 (in Chinese))
[20]Farrugia R,Portelli B,Grech I,et al.Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPs process[C].2020 Symposium on Design,Test,Integration&Packaging of MEMS and MOEMS (DTIP),Lyon,France,2020:1-6
[21]Zhang X L,Xu Y Q,Du M X.Self-aligned technique for the driving structure of optical MEMS chips[J].Micro and Nano Electronics Technology,2018,55(5):366-370(张晓磊,徐永青,杜妙璇.光MEMS芯片驱动结构自对准技术[J].微纳电子技术,2018,55(5):366-370 (in Chinese))
[22]Urey H,Kan C,Davis W O.Vibration mode frequency formulae for micromechanical scanners[J].Journal of Micromechanics and Microengineering,2005,15(9):1713-1721
[23]Fu L J,Peng L,Wu L.Application of harmonic response analysis in equipment vibration reduction[J].China Special Equipment Safety,2022,38(6):20-25(付罗均,彭岚,吴龙.谐响应分析在设备减振中的应用[J].中国特种设备安全,2022,38(6):20-25 (in Chinese))
[24]Qiao D,Zhao R,Zhang Y,et al.An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test[J].Microelectronics Reliability,2018,80:284-293
[25]Aunion Tech Co.,Ltd.A5M24.2-2400AL[DB/OL].2023.12.https:/www.auniontech.com/details-793.html
基本信息:
DOI:10.13922/j.cnki.cjvst.202401006
中图分类号:TH74;TH-39
引用信息:
[1]王峰,许高斌,尹盛华等.高谐振频率梳齿轴对称结构的MEMS扫描镜[J].真空科学与技术学报,2025,45(01):21-28.DOI:10.13922/j.cnki.cjvst.202401006.
基金信息:
安徽省科技创新攻坚计划项目(202423k09020047); 国家重点研发计划项目(2022YFB3205903); 安徽省科技计划项目(PA2022AKGY0012)