真空科学与技术学报

研究了双缸结构的双级滑阀真空的振动平衡,提出了定量平衡双级滑阀真空泵振动的方法;运用最小二乘法获得多级平衡配重的关键参数,精确平衡双级滑阀真空泵的不平衡惯性力。以2H-150滑阀真空泵为例进行振动平衡,平衡后的剩余惯性力减至1500N以内,振动力降幅达到80%左右;应用多级平衡配重方法所设计的真空泵在松地脚螺钉时的最大振幅仅为0.13mm。因此,针对双级滑阀泵振动的平衡计算方法是行之有效的,可使泵的振动在很小的范围内。

A novel technique was developed to effectively damp the vibration of the two-stage rotary piston vacuum pump with the double-cylinder structure.The mechanism responsible for the vibration was analyzed.The multi-level counterweights were precisely calculated in the least square method,so that the unbalanced inertia forces could be accurately balanced.The newly-developed technique was tested with the 2H-150 rotary-piston vacuum pump.The tested results show that the novel technique works well in damping the vibration of the vacuum pump.For example,the residual inertia force was reduced to less than 1500 N,nearly an 80% reduction,and the maximum vibration amplitude of the free-standing vacuum pump was found to be only 0.13 mm.