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针对溅射镀膜单体机工艺过程中真空室气压控制的非线性、时滞及参数时变等问题，提出一种自适应模糊滑模控制策略。通过建立真空系统的一阶惯性加纯滞后模型，采用遗忘因子递推最小二乘法辨识参数，得到气压控制的传递函数。设计积分滑模面与模糊逻辑补偿机制，构建自适应模糊滑模控制器，补偿真空系统的非线性特性并抑制外部扰动。经仿真与试验验证可知，所设计的控制器在0.1 Pa～10 Pa压力范围内的响应速度相较于常规滑模控制器提升35.7%，稳态气压超调量降低62.5%，有效提升溅射镀膜单体机镀膜过程中的气压控制精度与鲁棒性。
Abstract：An adaptive fuzzy sliding mode control strategy is proposed to address the nonlinearity, time lag and time-varying parameters of vacuum chamber air pressure control in magnetron sputtering coating process. The time-varying FOPDT characteristics of the vacuum system are revealed by establishing a system dynamics model and adopting the forgetting factor recursive least squares method to identify the parameters. The integral sliding mode surface and fuzzy logic compensation mechanism are designed to construct an adaptive controller to realize the dynamic suppression of nonlinearity and disturbance. Simulations and experiments show that compared with the traditional PID and conventional sliding mode control, the proposed controller improves the response speed by 35.7% and reduces the overshoot by 62.5% in the pressure interval of 0.1-10 Pa. The accuracy and robustness of air pressure control for the coating process are improved.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202504020
中图分类号:TB75
引用信息:
[1]胡明,许泽宇,来华杭,等.溅射镀膜单体机真空室气压的滑模控制策略设计[J].真空科学与技术学报,2025,45(10):868-880.DOI:10.13922/j.cnki.cjvst.202504020.
基金信息:
国家重点研发计划项目（2018YFB1308100)