1995 05
多晶薄膜及表面层的XRD分析方法讨论
基金项目(Foundation):
国家自然科学基金
邮箱(Email):
DOI:
10.13922/j.cnki.cjovst.1995.05.007
中文作者单位:
清华大学材料科学研究所!北京100084,清华大学材料科学研究所!北京100084,清华大学生物科学与技术系!北京100084
摘要(Abstract):
对多晶薄膜XRD分析的基本问题小角度衍射几何、非对称平行光束法和Seemann－Bohlin法的衍射几何强度计算，以及P－B法、S－B法对常规XRD分析的适应性进行了分析讨论。并对多晶薄膜XRD分析的当前进展、难点及发展作了分析。提出两种薄膜及表面层表征参量沿深度方向变化的情况下进行XRD深度分布分析的新方法，该方法具有真实深度尺度和定量的特点，并可用于界面分析。
关键词(KeyWords):
薄膜;;表层;;X射线衍射谱;;深度分布
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参考文献
1 Lim G S et al. J Appl Phys, 1986 159: 3543
2 Huang T C et al. IBM Research Report,RJ , 1986: 5109
3 Huang T C et al. Thin Solid Films, 1987; 148: 209
4 Read M H et al. Thin Solid Films, 1972; 10: 123
5 Lau S S et al. Thin Solid Films, 1974; 23: 205
6 Tao K et al . Rev Sci Instrum, 1987;56: 1343
7 Weiner K L. Z Krist, 1966;123: 315
8 Tu K N et al. J Appl Phys, 1972;43: 3283
9 Coulman B et al. J Appl Phys, 1985; 57: 643
10 Tao K et al. MRS Symposia Proceedings, 1986, 54: 687
11 陶琨等. 金属学报, 1987;B23: 254
12 Wilson A J C. Proceedings of Symposium on Accuracy in Powder Diffraction Held on NBS. Geitherburg, 1979,Special Publication 567. National Bureau of Standard,1980: 325
13 Parrish W et al. Acta Cryst, 1967 ; 23: 687
14 Mack M et al. Acta Cryst, 1967 ; 23: 697
15 Huang T C. Adv in X-ray Anal, 1992 ; 35: 143
16 Dosch H et al. Phys Rev Lett,1986;56(11): 1141
17 Segmuler A. J Vac Sci Technol, 1991;A9(4): 2477 .
18 Itoh N. APPl Phys Lett, 1993; 62 (7): 190
19 Burandt B et al. Phys Rev Lett, 1993; 17 (8): 1188
20 Naudon A. J Appl Cryst, 1991; 24: 501
21 Quaeyhnegens C et al. Thin Solid Films, 1991; 197: 37
22 Cemik R J. Adv in X-ray Anal., 1990;33: 101
23 Takenchi T. J Appl Phys, 1983; 54(2): 715
24 Bensonssan S. J Appl Cryst, 1987; 20: 222
25 Tao K et al. Proc 3rd China-Jap Sym on Thin Films. 1992:203
26 Georgopoulos P et al. Adv in X-ray Anal, 1992 ; 35: 185
27 Larsen R A et al. Adv in X-ray Anal, 1989 F 32: 311
28 Haase E L. Thin Solid Films, 1985 ; 124: 283
29陶琨.新材料研究.第2届中国材料研讨会论文集,大会特邀报告部分.北京:中国科协学会工作部出版,1988:168
30 Morre E. Adv in X-ray Anal, 1990; 33: 153
31于利根等.金属学报,1993;B29:187
32 Sasaki T et al. Adv in X-ray Anal, 1990 133: 171
33 Takayama T et al. Adv in X-ray Anal, 1990; 33: 109
34 Hart H et al. Acta Cryst, 1988;A44: 193
35 Scardi P et al. Thin Solid Films, 1993; 230: 130
36 Sibieude F et al. Thin Solid Films, 1991; 204: 217
37 Robinson K M et al. Thin Solid Films, 1992 ;210/211: 73
38 Lengeler B, Adv in X-ray Anal, 1992; 35: 127
39 Huang T C et al. Thin Solid Films, 1993; 230: 99
40陶琨等.物理测试,1986;3:19
41 Chaudhuri J et al. J Appl Phys, 1992; 71 (8): 3816
42 Ankner J F. J Appl Phys, 1993 ; 73(10): 6427
43周国良等.物理学报,1991;40(1):56
44 Plocyuet J. Phys Rev, 1988;B30(5): 3572
45 Chowski J et al. J Phys F, 1987; 13: 1973
46 Gladyszewski Grzegorz. Thin Solid Films, 1991; 204: 473
47 Tang Zizhou. Appl Phys Lett, 1993 ; 65 (15 ): 1771
48 Brown D B et al. Adv in X-ray Anal, 1992; 35: 177
49何旭初等.线性约束最优化.南京:南京大学出版社,1986
50 Evans C A. J Vac Sci Technol, 1975; 12: 144
51 Gergely G et al. Vacuum, 1986; 36: 471
52 Tikhonov A V et al. Ill-posed Problem in Nature Sciences. Moscow:MIR Publisher, 1987
2 Huang T C et al. IBM Research Report,RJ , 1986: 5109
3 Huang T C et al. Thin Solid Films, 1987; 148: 209
4 Read M H et al. Thin Solid Films, 1972; 10: 123
5 Lau S S et al. Thin Solid Films, 1974; 23: 205
6 Tao K et al . Rev Sci Instrum, 1987;56: 1343
7 Weiner K L. Z Krist, 1966;123: 315
8 Tu K N et al. J Appl Phys, 1972;43: 3283
9 Coulman B et al. J Appl Phys, 1985; 57: 643
10 Tao K et al. MRS Symposia Proceedings, 1986, 54: 687
11 陶琨等. 金属学报, 1987;B23: 254
12 Wilson A J C. Proceedings of Symposium on Accuracy in Powder Diffraction Held on NBS. Geitherburg, 1979,Special Publication 567. National Bureau of Standard,1980: 325
13 Parrish W et al. Acta Cryst, 1967 ; 23: 687
14 Mack M et al. Acta Cryst, 1967 ; 23: 697
15 Huang T C. Adv in X-ray Anal, 1992 ; 35: 143
16 Dosch H et al. Phys Rev Lett,1986;56(11): 1141
17 Segmuler A. J Vac Sci Technol, 1991;A9(4): 2477 .
18 Itoh N. APPl Phys Lett, 1993; 62 (7): 190
19 Burandt B et al. Phys Rev Lett, 1993; 17 (8): 1188
20 Naudon A. J Appl Cryst, 1991; 24: 501
21 Quaeyhnegens C et al. Thin Solid Films, 1991; 197: 37
22 Cemik R J. Adv in X-ray Anal., 1990;33: 101
23 Takenchi T. J Appl Phys, 1983; 54(2): 715
24 Bensonssan S. J Appl Cryst, 1987; 20: 222
25 Tao K et al. Proc 3rd China-Jap Sym on Thin Films. 1992:203
26 Georgopoulos P et al. Adv in X-ray Anal, 1992 ; 35: 185
27 Larsen R A et al. Adv in X-ray Anal, 1989 F 32: 311
28 Haase E L. Thin Solid Films, 1985 ; 124: 283
29陶琨.新材料研究.第2届中国材料研讨会论文集,大会特邀报告部分.北京:中国科协学会工作部出版,1988:168
30 Morre E. Adv in X-ray Anal, 1990; 33: 153
31于利根等.金属学报,1993;B29:187
32 Sasaki T et al. Adv in X-ray Anal, 1990 133: 171
33 Takayama T et al. Adv in X-ray Anal, 1990; 33: 109
34 Hart H et al. Acta Cryst, 1988;A44: 193
35 Scardi P et al. Thin Solid Films, 1993; 230: 130
36 Sibieude F et al. Thin Solid Films, 1991; 204: 217
37 Robinson K M et al. Thin Solid Films, 1992 ;210/211: 73
38 Lengeler B, Adv in X-ray Anal, 1992; 35: 127
39 Huang T C et al. Thin Solid Films, 1993; 230: 99
40陶琨等.物理测试,1986;3:19
41 Chaudhuri J et al. J Appl Phys, 1992; 71 (8): 3816
42 Ankner J F. J Appl Phys, 1993 ; 73(10): 6427
43周国良等.物理学报,1991;40(1):56
44 Plocyuet J. Phys Rev, 1988;B30(5): 3572
45 Chowski J et al. J Phys F, 1987; 13: 1973
46 Gladyszewski Grzegorz. Thin Solid Films, 1991; 204: 473
47 Tang Zizhou. Appl Phys Lett, 1993 ; 65 (15 ): 1771
48 Brown D B et al. Adv in X-ray Anal, 1992; 35: 177
49何旭初等.线性约束最优化.南京:南京大学出版社,1986
50 Evans C A. J Vac Sci Technol, 1975; 12: 144
51 Gergely G et al. Vacuum, 1986; 36: 471
52 Tikhonov A V et al. Ill-posed Problem in Nature Sciences. Moscow:MIR Publisher, 1987
基本信息:
DOI：10.13922/j.cnki.cjovst.1995.05.007
中图分类号:TB43
引用信息:
[1]陶琨,骆建,徐育敏.多晶薄膜及表面层的XRD分析方法讨论[J].真空科学与技术,1995(05).DOI:10.13922/j.cnki.cjovst.1995.05.007.
基金信息:
国家自然科学基金
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