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对多晶薄膜XRD分析的基本问题小角度衍射几何、非对称平行光束法和Seemann－Bohlin法的衍射几何强度计算，以及P－B法、S－B法对常规XRD分析的适应性进行了分析讨论。并对多晶薄膜XRD分析的当前进展、难点及发展作了分析。提出两种薄膜及表面层表征参量沿深度方向变化的情况下进行XRD深度分布分析的新方法，该方法具有真实深度尺度和定量的特点，并可用于界面分析。
Abstract：The powder diffraction geometry of thin films, diffraction intensity of asymmetric parallel beam method and Seemann-Bohlin method are analyzed, The advances,applications and difficulties on powder diffraction of thin films are discussed. Two quantitative and non-destructive XRD methods are presented to do depth profile analysis for polycrystalline thin films and surface layers,in which the characteristic parameters vary continuously in depth direction.
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基本信息:
DOI：10.13922/j.cnki.cjovst.1995.05.007
中图分类号:TB43
引用信息:
[1]陶琨,骆建,徐育敏.多晶薄膜及表面层的XRD分析方法讨论[J].真空科学与技术,1995(05).DOI:10.13922/j.cnki.cjovst.1995.05.007.
基金信息:
国家自然科学基金