2025 01 v.45 1-7
Zr-V-Fe吸气剂动态真空维持性能
基金项目(Foundation):
国家重点研发计划项目（2023YFC2205702）;
国家自然科学基金面上项目（62271187）;国家自然科学基金青年基金项目（62101172）;
中央高校基本科研业务经费项目（JZ2024HGTG0307）
邮箱(Email):
caoqing@hfut.edu.cn;wxudi@hfut.edu.cn;
DOI:
10.13922/j.cnki.cjvst.202408009
中文作者单位:
合肥工业大学机械工程学院;浙江光电子研究院;
摘要(Abstract):
吸气剂是密闭空间真空长寿命维持的关键，当环境条件发生改变时会导致吸气材料吸放气特性剧烈变化，进而影响真空度，因此研究温度影响下的吸气剂动态真空维持特性具有重要意义。文章利用差压法系统在密闭空间中对不同吸气饱和度的Zr-V-Fe吸气剂进行加热，研究吸气饱和度和温度对密闭空间真空动态演化性能的影响。实验结果表明，在温度升高情况下，吸气剂能够在较长时间内有效维持腔室内真空度。吸气剂饱和度越高，可吸收气体的内部空间越小，则真空维持性能越差；在一定临界温度下，较高的温度会加快气体的扩散速率，提高吸气剂的吸气性能，从而提升维持性能。本研究有助于深入理解吸气剂的真空维持性能，对无源真空系统优化设计和性能提升提供理论和实验依据。
关键词(KeyWords):
非蒸散型吸气剂;差压法;真空维持性能;吸气性能测试
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参考文献
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[3]Zhuang S Q.Modern getters and their applications[J].Vacuum Electronics,1994,5:42-49（庄寿全.现代吸气剂及其应用技术[J].真空电子技术，1994,5:42-49(in Chinese））
[4]Benvenuti C,Chiggiato P,Cicoira F,et al.Nonevaporable getter films for ultrahigh vacuum applications[J].Journal of Vacuum Science&Technology A:Vacuum,Surfaces,and Films,1998,16(1):148-154
[5]Miyazawa T,Tobishima K,Kato H,et al.Non-evaporable getter(NEG) coating using titanium and palladium vacuum sublimation[J].Vacuum and Surface Science,2018,61(4):227-235
[6]Li X G,Luo Z F.Research on property measurement system of non-evaporable getter[J].Vacuum,2017,54(2):60-63（李晓刚,罗志芳.非蒸散型吸气剂吸气性能测试方法的研究[J].真空，2017,54(2):60-63(in Chinese））
[7]Miyazawa T,Kano Y,Nakayama Y,et al.Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of out-gassing by baking under oxygen[J].Journal of Vacuum Science&Technology A,2019,37(2):021601
[8]Malyshev O B,Middleman K J.Test Particle Monte-Carlo modelling of installations for NEG film pumping properties evaluation[J].Vacuum,2009,83(6):976-979
[9]Yan P,Han X B,Leng H Y,et al.Latest development of non-evaporable getter materials[J].Chinese Journal of Vacuum Science and Technology,2018,38(8):650-656（颜攀,韩兴博,冷海燕,等.非蒸散型吸气剂的研究进展[J].真空科学与技术学报，2018,38(8):650-656 (in Chinese））
[10]ISO 21360-5,Vacuum technology-Standard methods for measuring vacuum-pump performance-Part5:Non-evaporable getter (NEG) vacuum pumps[S].2002
[11]Wang L L.New methods for performance testing of NEGmaterials for vacuum maintenance in confined spaces[D].Hefei:Hefei University of Technology,2023（王蓝陵.面向密闭空间真空维持的NEG材料性能测试新方法[D].合肥:合肥工业大学,2023 (in Chinese））
[12]Zhang Y P,Zhu Y F,Liu X Y,et al.Dewar vacuum failure time based on the material outgassing characteristics[J].Vacuum,2016,53(1):46-50（张亚平,朱颖峰,刘湘云,等.基于材料放气特性的杜瓦真空失效时间研究[J].真空，2016,53(1):46-50 (in Chinese））
[13]Hauer V,Battes K,Fl?mmich M,et al.Outgassing rate measurements with the difference method in the framework of EMRP IND12[J].Vacuum,2015,122:250-254
[14]Knize R J,Cecchi J L.Theory of bulk gettering[J].Journal of Applied Physics,1983,54(6):3183-3189
[15]Cui H.Investigation on gas absorption characteristic and application of ZrV based alloy[D].Beijing:General Research Institute for Nonferrous Metals,2015（崔航.ZrV系合金吸气特性和应用研究[D].北京:北京有色金属研究总院,2015 (in Chinese))
基本信息:
DOI：10.13922/j.cnki.cjvst.202408009
中图分类号:TB79
引用信息:
[1]唐丽军,王婧华,曹青等.Zr-V-Fe吸气剂动态真空维持性能[J].真空科学与技术学报,2025,45(01):1-7.DOI:10.13922/j.cnki.cjvst.202408009.
基金信息:
国家重点研发计划项目（2023YFC2205702）; 国家自然科学基金面上项目（62271187）;国家自然科学基金青年基金项目（62101172）; 中央高校基本科研业务经费项目（JZ2024HGTG0307）