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水蒸气透过率是评估薄膜阻隔性能的关键技术指标，目前常用的检测方法精度较低，测量量程有限。基于气体分子渗透理论，开展了不同温湿度真空环境下的水蒸气透过薄膜的吸附、溶解、渗透、扩散及脱附的物理过程的研究，分析了阻隔性能的测试方法及其测试系统的基本特征，提出以质谱法分析技术为核心的高精度水蒸气透过率测试系统设计方案。开发了测试系统装置，实现了系统经针阀微量取样、四极质谱仪精确测量透过薄膜的水蒸气分压，通过理论公式换算得到水蒸气透过率，解决了传统方法测试精度低的技术难题。同时，实验研究了不同温湿度条件下PET薄膜水蒸气透过率的性能特征及影响因素，得到了影响薄膜阻隔性能的特征曲线。结果表明：温湿度升高会增大气体室水蒸气浓度，增大吸附速率和扩散系数，加剧分子热运动，导致水蒸气透过率增大，阐释了温湿度调控PET薄膜阻隔性能的物理机制，为优化高精度水蒸气透过率测试系统的设计提供了理论依据与工程设计参考。
Abstract：Water vapor transmission rate(WVTR) is a key technical indicator for evaluating the barrier performance of thin films. Currently, common detection methods suffer from low accuracy and limited measurement ranges. Based on gas molecule permeation theory, this study investigates the physical processes of adsorption, dissolution, permeation, diffusion, and desorption of water vapor through thin films under various temperature and humidity conditions in a vacuum environment. It analyzes the testing methods for barrier performance and the fundamental characteristics of relevant test systems, and proposes a design scheme for a highaccuracy WVTR test system centered on mass spectrometry analysis technology. A test system device was developed, which achieves micro-leak sampling via a needle valve and accurate measurement of the water vapor partial pressure penetrating the film using a quadrupole mass spectrometer. The water vapor transmission rate is then derived through theoretical conversion, thereby resolving the technical issue of low testing accuracy inherent in traditional methods. Furthermore, experimental studies were conducted on the performance characteristics and influencing factors of PET film WVTR under different temperature and humidity conditions, yielding characteristic curves that affect the film's barrier performance. The results indicate that increases in temperature and humidity raise the water vapor concentration in the gas chamber, enhance the adsorption rate and diffusion coefficient, intensify molecular thermal motion, and consequently lead to an increase in the water vapor transmission rate. This elucidates the physical mechanism by which temperature and humidity regulate the barrier performance of PET films,providing a theoretical basis and engineering design reference for optimizing the design of high-accuracy water vapor transmission rate test systems.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202602006
中图分类号:TB383.2;O657.63
引用信息:
[1]王国栋,张世恒,李建文,等.基于质谱法的水蒸气透过率测试系统设计及实验研究[J].真空科学与技术学报,2026,46(07):611-618.DOI:10.13922/j.cnki.cjvst.202602006.
2026-04-23
2026-04-23
2026-04-23