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针对电子束增材加工过程中，电子枪聚焦部件的结构和尺寸会直接影响电子束焦点处的束流密度和束流半径从而影响电子束的束流品质的问题，通过利用CST仿真软件对电子枪聚焦部件进行深入分析，模拟出不同结构尺寸参数对电子束电流密度及束流半径的具体影响结果。仿真结果表明，在其他参数不变的情况下，聚焦线圈缠绕的匝数从800逐渐增加至1600时，电子束流半径呈现先减小后增大的趋势，在匝数为1200时束斑半径达到最小值0.816 mm；当磁轭间隙由60 mm递增至80 mm时，电子束束斑半径从0.834 mm逐渐减小至0.799 mm；聚焦线圈内径从90 mm增至120 mm时，电子束流半径由0.866 mm减小至0.792 mm。综合实验及分析表明，为实现最优束流品质，聚焦部件的最佳参数组合为：磁轭间隙80 mm、线圈内径120 mm、线圈匝数1200匝。
Abstract：In electron beam additive manufacturing, the structure and dimensions of electron gun focusing components directly influence beam current density and radius at the focal point, which affects beam quality. This study employs CST simulation software to conduct an in-depth analysis of focusing components, simulating the specific impacts of structural parameters on beam current density and beam radius. Simulation results demonstrate that under constant parameters, as the winding turns of the focusing coil increase from 800 to 1600, the beam radius first decreases then increases, reaching a minimum of 0.816 mm at 1200 turns. When the yoke gap expands from 60 mm to 80 mm, the beam spot radius gradually decreases from 0.834 mm to 0.799 mm. Similarly, increasing the coil inner diameter from 90 mm to 120 mm reduces the beam radius from 0.866 mm to 0.792 mm. Experimental and analytical results indicate that the optimal configuration for achieving peak beam quality comprises: 80 mm yoke gap, 120 mm coil inner diameter, and 1200 turns of coil winding.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202512005
中图分类号:TG439.3
引用信息:
[1]杨昊,左从进,许海鹰,等.高压电子枪聚焦部件仿真优化与实验验证[J].真空科学与技术学报,2026,46(04):359-369.DOI:10.13922/j.cnki.cjvst.202512005.
2026-03-13
2026-03-13
2026-03-13