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制冷机低温泵凭借清洁无油、高抽速等优势，在核聚变、空间环境模拟、高能物理研究等领域得到广泛应用。针对低温泵抽气性能提升需求，提出一种基于正交试验与熵权法的多目标优化方法，用于探究障板角度（ψ）、障板重叠率（η）、冷板层数（n）、冷板半径（r）等参数对制冷机低温泵性能指标的影响规律，并对低温泵的性能开展多目标综合评价，结果表明不同参数对各性能指标的影响程度存在差异，并进一步通过熵权法确定了以上参数对抽气性能指标的权重：二级辐射热权重最大，其次为一级辐射热、冷板阵列最高温、传输概率。依据上述权重，通过正交试验综合评价分析方法，对低温泵结构进行了优化，获得了低温泵最优参数组合设计方案：障板角度50°、障板重叠率0.9、冷板层数9层、冷板半径90 mm。上述多目标优化方法与综合评价思路，为制冷机低温泵的抽气性能分析和结构优化提供了有益的参考。
Abstract：Refrigerator cooled cryopumps have been widely applied in fields such as nuclear fusion， space environment simulation， and high-energy physics research owing to their advantages including oil-free cleanliness and high pumping speed. To meet the demand for improving the pumping performance of cryopumps， a multi-factor and multi-objective optimization method based on orthogonal experiment and entropy weight method is proposed. This method is employed to investigate the influence laws of parameters such as baffle angle (ψ)， baffle overlap ratio (η)， number of cold plate layers (n)， and cold plate radius (r) on the performance indicators of refrigerator cooled cryopumps， and to conduct a multi-objective comprehensive evaluation of cryopump performance. The results show that different parameters exert varying degrees of influence on each performance indicator. Furthermore， the weights of the above parameters relative to the pumping performance indicators are determined via the entropy weight method: secondary radiation heat has the largest weight， followed by primary radiation heat， the maximum temperature of the cold plate array， and transmission probability. On the basis of these weights， the structure of the cryopump is optimized using the comprehensive evaluation and analysis method of orthogonal experiment， and the optimal parameter combination scheme for the cryopump is obtained: baffle angle of 50°， baffle overlap ratio of 0.9， cold plate layers of 9， and cold plate radius of 90 mm. The aforementioned multi-objective optimization method and comprehensive evaluation idea provide a useful reference for the pumping performance analysis and structural optimization of refrigerator cooled cryopumps.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202604015
中图分类号:TB651
引用信息:
[1]胡振宇,杨庆喜,林可馨,等.基于多目标的制冷机低温泵抽气性能分析与研究[J].真空科学与技术学报().DOI:10.13922/j.cnki.cjvst.202604015.
基金信息:
国家重点研发计划项目（2024YFE03100000）
2026-06-24
2026-06-24
2026-06-24