| 93 | 0 | 26 |
| 下载次数 | 被引频次 | 阅读次数 |
爪型干式真空泵因其无油、高效等优点广泛应用于半导体制造领域。针对传统爪型干式真空泵在含颗粒介质环境中易磨损的问题，文章提出一种基于非对称不完全啮合原理的转子结构优化方法。通过理论推导建立了转子型线的参数方程，重点优化节圆半径比和爪尖直线倾角等关键几何参数，并利用数值模拟分析了新型转子的工作特性。结果表明，优化后的转子容积利用率提升至41.55%，混合阶段压力波动减少，颗粒通过性显著增强。新型爪式转子设计能够有效改善压力分布和速度分布，可使余隙腔内最高压力降低42.35%，提高真空泵的效率和可靠性。该设计不仅能有效降低能耗和延长设备寿命，同时显著提升了半导体制造的工艺稳定性。研究结果为开发适用于半导体及其相关产业的高性能爪型干式真空泵提供了重要的理论依据，具有重要的应用价值。
Abstract：Claw-type dry vacuum pumps are widely used in the semiconductor manufacturing industry due to their oil-free and high-efficiency characteristics. To address the wear issues of traditional claw-type vacuum pumps in environments containing particulate media, this study proposes a rotor structure optimization method based on the principle of asymmetric incomplete meshing. Parametric equations for rotor profiles were established through theoretical derivation, with a focus on optimizing key geometric parameters such as the pitch circle radius ratio and the inclination angle of the claw tip. Numerical simulations were conducted to analyze the working characteristics of the novel rotors. The results indicate that the optimized rotor achieves a volumetric efficiency of 41.55%, reduces pressure fluctuations during the mixing phase, and significantly enhances particle transport performance. The asymmetric claw-type rotor design effectively improves pressure and velocity distributions, achieving a 42.35%reduction of the peak pressure in the residual clearance chamber, while enhancing the pump efficiency and reliability. This design not only reduces energy consumption and extends equipment lifetime but also significantly enhances the process stability of semiconductor manufacturing. The findings provide a solid theoretical foundation for developing high-performance claw-type dry vacuum pumps suitable for the semiconductor and related industries, offering substantial application value. These findings provide valuable insights for the development of high-performance claw-type dry vacuum pumps in semiconductors and related industries.
[1]Liu X M, Chen X. Application of dry claw vacuum pump to hydrogen chloride gas delivery system[J]. Chlor-Alkali Industry,2020,56(07):33-35（刘晓明,陈欣.干式爪型真空泵在氯化氢气体输送系统中的应用[J].氯碱工业，2020,56(07):33-35(in Chinese)）
[2]Zhou Q, Zhang S G, Hu J, et al. Localized and improved application of claw dry vacuum pump[J]. China Chlor-Alkali,2022(03):20-23（周强,张胜飞,胡锦,等.爪型干式真空泵的国产化改进应用[J].中国氯碱，2022(03):20-23(in Chinese)）
[3]Bai Z C, Ren F Q. Analysing the maintenance and overhaul of claw-type dry vacuum pumps[J]. Mechanical Management and Development, 2024, 39(07):283-284+323（白智聪,任富强.浅析爪型干式真空泵的维护检修[J].机械管理开发，2024,39(07):283-284+323(in Chinese)）
[4]Wang J, Feng H, Zhao F, et al. Geometric design of novel straight claw rotors for claw vacuum pumps[J]. Mechanism and Machine Theory,2019,136:244-255
[5]Wang J, Cui D, Pang X, et al. Geometric design and performance analysis of a novel smooth rotor profile of claw vacuum pumps[J]. Vacuum,2017,143:174-184
[6]Wang J, Cui D, Liu R Q, et al. Investigation of novel straight claw rotor for claw vacuum pumps and its performance[J]. Journal of China University of Petroleum,2018,42(05):148-154（王君,崔冬,刘瑞青,等.爪式真空泵的新型直爪转子型线及其性能[J].中国石油大学学报(自然科学版)，2018,42(05):148-154(in Chinese)）
[7]Li J J, Ren C J, Wang J, et al. A new type of gear claw rotor of claw vacuum pump and its mechanical properties[J]. Chinese Journal of Vacuum Science and Technology,2024,44(07):583-591（李杰杰,任纯吉,王君,等.爪式真空泵新型齿轮爪式转子及其力学性能研究[J].真空科学与技术学报，2024,44(07):583-591(in Chinese)）
[8]Pan S, Wang J, Zhao X, et al. New design and transient flow analysis of a claw vacuum pump with novel gearclaw rotors[J]. Vacuum,2023,216:112470
[9]Pan S Y, Ren C J, Wang J, et al. Transient flow characteristics of a claw hydrogen circulating pump with high sealing rotors[J]. Journal of Harbin Institute of Technology,2023,55(12):76-85（潘诗洋,任纯吉,王君,等.爪式氢气循环泵高密封型转子及瞬态流动特性[J].哈尔滨工业大学学报，2023,55(12):76-85(in Chinese)）
[10]Zhao X, Tan Q P, Wang J, et al. Construction and performance study of elliptical arc straight claw rotor of claw vacuum pump[J]. Chinese Journal of Vacuum Science and Technology,2021,41(12):1136-1141（赵鑫,谈庆朋,王君,等.爪式真空泵椭圆弧型直爪转子的构建与性能研究[J].真空科学与技术学报，2021, 41(12):1136-1141(in Chinese)）
[11]Wang J, Xin Y J, Pan S Y, et al. Working characteristics and transient simulation of double-claw hydrogen circulation pump for fuel cells[J]. Journal of Harbin Engineering University,2025,46(02):267-275（王君,辛远杰,潘诗洋,等.燃料电池用双爪氢气循环泵工作特性与瞬态模拟[J].哈尔滨工程大学学报，2025,46(02):267-275(in Chinese)）
[12]Zhao F, Wei S H, Wang J, et al. The geometric theory and working Process simulation of three-claw rotors for claw vacuum pumps[J]. Fluid Machinery,2019,47(05):33-38（赵峰,魏蜀红,王君,等.爪式真空泵三爪转子的几何理论与工作过程模拟[J].流体机械，2019, 47(05):33 -38(in Chinese)）
[13]Pan S Y, Wang J, Tan Q P, et al. Analysis and numerical simulation of claw vacuum pumps with novel three-claw rotors[J]. Vacuum,2021,192:110442
[14]Raykov A, Salikeev S, Burmistrov A, et al. The working process of an oil-free claw vacuum pump[J]. Vakuum in Forschung und Praxis,2017,29(2):45-49
[15]Raykov A, Salikeev S, Burmistrov A, et al. Experimental study of oil-free claw vacuum pump characteristics[J].Vakuum in Forschung und Praxis,2016,28(3):43-47
[16]Gu P, Xing L, Wang Y, et al. A multi-objective parametric study of the claw hydrogen pump for fuel cell vehicles using taguchi method and ANN[J]. International Journal of Hydrogen Energy,2021,46(9):6680-6692
[17]Xiong X, Xue Z, Wu X, et al. Modelling and flow rate control methods for anode tail gas circulation intake system at SOFC[J]. International Journal of Hydrogen Energy,2022,47(36):16201-16213
[18]Hu K H, Shen X Q, Wu Z B. Development of novel labyrinth seal for claw-type dry vacuum pump[J]. Chinese Journal of Vacuum Science and Technology,2017,37(03):298-301（胡宽辉,沈兴全,吴竹兵.爪型干式真空泵的迷宫密封设计与研究[J].真空科学与技术学报，2017,37(03):298-301(in Chinese)）
[19]Gu P, Xing L, Wang Y, et al. Transient flow field and performance analysis of a claw pump for FCVs[J]. International Journal of Hydrogen Energy, 2020, 46(1):984-997
[20]Lu Y, Rane S, Kovacevic A. Evaluation of cut cell cartesian method for simulation of a hook and claw type hydrogen pump[J]. International Journal of Hydrogen Energy,2022,47(54):23006-23018
[21]Dong K, Liu G, Yang Q, et al. Flow field analysis and performance study of claw hydrogen circulating pump in fuel cell system[J]. International Journal of Hydrogen Energy,2021,46(69):34438-34448
基本信息:
DOI：10.13922/j.cnki.cjvst.202505001
中图分类号:TB752
引用信息:
[1]魏民,刘海滨,叶乐志,等.非对称爪型干式真空泵转子型线设计与数值模拟[J].真空科学与技术学报,2026,46(01):14-22.DOI:10.13922/j.cnki.cjvst.202505001.
基金信息:
北京工业大学高层次人才基金项目（048000514123686）
2025-06-30
2025-06-30
2025-06-30