真空科学与技术学报

高能同步辐射光源（HEPS）作为具有极高亮度和极低发射度的国际先进的第四代光源，其对真空系统的密封性和洁净度提出了严苛要求。真空检漏与残余气体分析是保障真空系统性能达标的关键环节。文章系统论述了HEPS储存环真空系统在安装、调试与运行阶段的真空检漏策略与实践。重点阐述了利用氦质谱检漏仪的真空模式法的检漏方案，详述了定位各类漏点（如焊缝缺陷、密封圈安装不当等）的流程与解决方案，并分析了检漏过程中仪器界面的典型响应特征。同时，文章深入探讨了四极质谱仪（QMS）在真空系统调试中的双重作用：一方面作为高灵敏度的检漏工具，辅助定位了氦质谱检漏仪在难以检漏情形下的疑难漏点；另一方面，作为残余气体成分分析的关键设备，系统测量并对比了储存环有束流加载前后真空腔内的残余气体谱图。研究证实了所采用的检漏方法与分析策略的有效性与可靠性，为HEPS储存环真空系统的达标与稳定运行提供了坚实保障，其经验对同类大科学装置的真空质控与分析具有重要的参考价值。

As an internationally advanced fourth-generation light source with ultra-high brightness and ultralow emittance, the High Energy Photon Source(HEPS) imposes stringent requirements on the sealing performance and cleanliness of its vacuum system. Vacuum leak detection and residual gas analysis are key procedures to ensure the vacuum system meets performance standards. This paper systematically elaborates on the strategies and practices of vacuum leak detection for the HEPS storage ring vacuum system during the installation, commissioning,and operation phases. It focuses on expounding the leak detection scheme using the vacuum mode method of helium mass spectrometer leak detectors, detailing the procedures and solutions for locating various leak points(such as weld defects and improper installation of sealing rings), and analyzing the typical response characteristics of the instrument interface during leak detection. Meanwhile, this paper deeply explores the dual roles of Quadrupole Mass Spectrometers(QMS) in the commissioning of vacuum systems: on the one hand, as a high-sensitivity leak detection tool, it assists in locating difficult-to-detect leaks that are challenging for helium mass spectrometer leak detectors;on the other hand, as a key device for residual gas composition analysis, it systematically measures and compares the residual gas spectra in the vacuum chamber of the storage ring before and after beam loading. This study verifies the effectiveness and reliability of the adopted leak detection methods and analysis strategies, providing a solid guarantee for the qualification and stable operation of the HEPS storage ring vacuum system. Its experience holds important reference value for vacuum quality control and analysis of similar large scientific facilities.